@InProceedings{Trava-AiroldiBoneSantCora:2007:DLFiPr,
author = "Trava-Airoldi, Vladimir Jesus and Bonetti, L. F. and Santos, L. V.
and Corat, Evaldo Jos{\'e}",
affiliation = "{Instituto Nacional de Pesquisas Espaciais (INPE)} and ITA and
{Instituto Nacional de Pesquisas Espaciais (INPE)} and {Instituto
Nacional de Pesquisas Espaciais (INPE)}",
title = "DLC film properties obtained by low cost and modified pulsed-DC
discharge",
year = "2007",
organization = "International Conference on Metallurgical Coatings and Thin
Films.",
abstract = "Surface and bulk properties of diamond-like carbon films prepared
by using different techniques and under different conditions have
been of great concern. The main focus is to reach low friction
coefficient, low total stress, high hardness, and very high
adherence with the substrate, including the deposition in large
area at large growth rate. In this work, DLC films were obtained
by using a low cost modified Pulsed-DC Discharge technique.
Different pulse bursts with different pulse width and delay time
were considered. Studies have been carried out in order to match
the best set of parameters as mentioned above for different
applications, as required in the frame work of our project. The
sp2/sp3 ratio measurements, growth rate, hardness, friction
coefficient, total stress, and the adherence on Ti6AL4V substrate
were studied as a function of the pulse burst characteristic.
Micro indentation ranging from 10 to 50 mN was used to measure the
hardness on thin DLC films, the friction coefficient and critical
load were performed by using a trybometer ranging form 0.2 up to
50 N, a conventional perphilometry technique was used to measure
the total stress and thicknesses ranging from 0.2 to 4
micrometers. Raman analysis besides the quality, also were used to
evaluate the sp2/sp3 ratio. Finally, low friction coefficient, low
total stress, high hardness and very high adherence were obtained,
so that, some consideration concerning scaling up for industrial
production of DLC films will be presented.",
conference-location = "San Diego, Calif{\'o}rnia",
conference-year = "23-27 Apr.",
language = "en",
urlaccessdate = "11 maio 2024"
}